11/17/2011	12:11:01 AM	Helium valve closed
11/17/2011	12:11:01 AM	BCl3 valve closed
11/17/2011	12:11:01 AM	PH3 valve closed
11/17/2011	12:11:01 AM	SiCl4 pre valve closed
11/17/2011	12:11:01 AM	SiCl4 post valve closed
11/17/2011	12:11:01 AM	Main Vac valve closed
11/17/2011	12:11:01 AM	Bypass valve closed
11/17/2011	12:11:01 AM	H2 valve opened
11/17/2011	12:11:01 AM	Bubbler valve opened
11/17/2011	12:11:01 AM	Helium MFC set to  0.000000
11/17/2011	12:11:01 AM	H2 MFC set to  500.000000
11/17/2011	12:11:01 AM	BCl3 MFC set to  0.000000
11/17/2011	12:11:01 AM	PHl3 MFC set to  0.000000
11/17/2011	12:11:01 AM	SiCl4 MFC set to  0.000000
11/17/2011	12:11:01 AM	Bypass solenoid MFC set to  0.000000
11/17/2011	12:11:02 AM	Tube furnace set to 750
11/17/2011	12:21:02 AM	H2 valve closed
11/17/2011	12:21:02 AM	BCl3 valve closed
11/17/2011	12:21:02 AM	PH3 valve closed
11/17/2011	12:21:02 AM	SiCl4 pre valve closed
11/17/2011	12:21:02 AM	SiCl4 post valve closed
11/17/2011	12:21:02 AM	Main Vac valve closed
11/17/2011	12:21:02 AM	Bypass valve closed
11/17/2011	12:21:02 AM	Helium valve opened
11/17/2011	12:21:02 AM	Bubbler valve opened
11/17/2011	12:21:02 AM	Helium MFC set to  400.000000
11/17/2011	12:21:02 AM	H2 MFC set to  0.000000
11/17/2011	12:21:02 AM	BCl3 MFC set to  0.000000
11/17/2011	12:21:02 AM	PHl3 MFC set to  0.000000
11/17/2011	12:21:02 AM	SiCl4 MFC set to  0.000000
11/17/2011	12:21:02 AM	Bypass solenoid MFC set to  0.000000
11/17/2011	12:21:02 AM	Tube furnace set to 0
11/17/2011	12:46:02 AM	Helium valve closed
11/17/2011	12:46:02 AM	H2 valve closed
11/17/2011	12:46:02 AM	BCl3 valve closed
11/17/2011	12:46:02 AM	PH3 valve closed
11/17/2011	12:46:02 AM	SiCl4 pre valve closed
11/17/2011	12:46:02 AM	SiCl4 post valve closed
11/17/2011	12:46:02 AM	Main Vac valve closed
11/17/2011	12:46:02 AM	Bypass valve closed
11/17/2011	12:46:02 AM	Bubbler valve closed
11/17/2011	12:46:02 AM	Helium MFC set to  0.000000
11/17/2011	12:46:02 AM	H2 MFC set to  0.000000
11/17/2011	12:46:02 AM	BCl3 MFC set to  0.000000
11/17/2011	12:46:02 AM	PHl3 MFC set to  0.000000
11/17/2011	12:46:02 AM	SiCl4 MFC set to  0.000000
11/17/2011	12:46:02 AM	Bypass solenoid MFC set to  0.000000
11/17/2011	12:46:02 AM	Tube furnace set to 50
11/17/2011	12:51:02 AM	Helium valve closed
11/17/2011	12:51:02 AM	H2 valve closed
11/17/2011	12:51:02 AM	BCl3 valve closed
11/17/2011	12:51:02 AM	PH3 valve closed
11/17/2011	12:51:02 AM	SiCl4 pre valve closed
11/17/2011	12:51:02 AM	SiCl4 post valve closed
11/17/2011	12:51:02 AM	Main Vac valve closed
11/17/2011	12:51:02 AM	Bubbler valve closed
11/17/2011	12:51:02 AM	Bypass valve opened
11/17/2011	12:51:02 AM	Helium MFC set to  0.000000
11/17/2011	12:51:02 AM	H2 MFC set to  0.000000
11/17/2011	12:51:02 AM	BCl3 MFC set to  0.000000
11/17/2011	12:51:02 AM	PHl3 MFC set to  0.000000
11/17/2011	12:51:02 AM	SiCl4 MFC set to  0.000000
11/17/2011	12:51:02 AM	Bypass solenoid MFC set to  0.000000
11/17/2011	12:51:02 AM	Tube furnace set to 0
11/17/2011	12:56:02 AM	Helium valve closed
11/17/2011	12:56:02 AM	H2 valve closed
11/17/2011	12:56:02 AM	BCl3 valve closed
11/17/2011	12:56:02 AM	PH3 valve closed
11/17/2011	12:56:02 AM	SiCl4 pre valve closed
11/17/2011	12:56:02 AM	SiCl4 post valve closed
11/17/2011	12:56:02 AM	Bypass valve closed
11/17/2011	12:56:02 AM	Bubbler valve closed
11/17/2011	12:56:02 AM	Main Vac valve opened
11/17/2011	12:56:02 AM	Helium MFC set to  0.000000
11/17/2011	12:56:02 AM	H2 MFC set to  0.000000
11/17/2011	12:56:02 AM	BCl3 MFC set to  0.000000
11/17/2011	12:56:02 AM	PHl3 MFC set to  0.000000
11/17/2011	12:56:02 AM	SiCl4 MFC set to  0.000000
11/17/2011	12:56:02 AM	Bypass solenoid MFC set to  0.000000
11/17/2011	12:56:02 AM	Tube furnace set to 0
11/17/2011	12:56:03 AM	Run finished at 12:56 AM
11/17/2011	7:00:20 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/17/2011	7:00:21 AM	Recipe started at 7:00 AM
11/17/2011	7:00:21 AM	Helium valve closed
11/17/2011	7:00:21 AM	H2 valve closed
11/17/2011	7:00:21 AM	BCl3 valve closed
11/17/2011	7:00:21 AM	PH3 valve closed
11/17/2011	7:00:21 AM	SiCl4 pre valve closed
11/17/2011	7:00:21 AM	SiCl4 post valve closed
11/17/2011	7:00:21 AM	Main Vac valve closed
11/17/2011	7:00:21 AM	Bypass valve closed
11/17/2011	7:00:21 AM	Bubbler valve closed
11/17/2011	7:00:21 AM	Helium MFC set to  0.000000
11/17/2011	7:00:21 AM	H2 MFC set to  0.000000
11/17/2011	7:00:21 AM	BCl3 MFC set to  0.000000
11/17/2011	7:00:21 AM	PHl3 MFC set to  0.000000
11/17/2011	7:00:21 AM	SiCl4 MFC set to  0.000000
11/17/2011	7:00:21 AM	Bypass solenoid MFC set to  0.000000
11/17/2011	7:00:21 AM	Tube furnace set to 0
11/17/2011	7:00:24 AM	H2 valve closed
11/17/2011	7:00:24 AM	BCl3 valve closed
11/17/2011	7:00:24 AM	PH3 valve closed
11/17/2011	7:00:24 AM	SiCl4 pre valve closed
11/17/2011	7:00:24 AM	SiCl4 post valve closed
11/17/2011	7:00:24 AM	Main Vac valve closed
11/17/2011	7:00:24 AM	Bypass valve closed
11/17/2011	7:00:24 AM	Bubbler valve closed
11/17/2011	7:00:24 AM	Helium valve opened
11/17/2011	7:00:24 AM	Helium MFC set to  500.000000
11/17/2011	7:00:24 AM	H2 MFC set to  0.000000
11/17/2011	7:00:24 AM	BCl3 MFC set to  0.000000
11/17/2011	7:00:24 AM	PHl3 MFC set to  0.000000
11/17/2011	7:00:24 AM	SiCl4 MFC set to  0.000000
11/17/2011	7:00:24 AM	Bypass solenoid MFC set to  0.000000
11/17/2011	7:00:24 AM	Tube furnace set to 0
11/17/2011	7:01:29 AM	Helium valve closed
11/17/2011	7:01:29 AM	H2 valve closed
11/17/2011	7:01:29 AM	BCl3 valve closed
11/17/2011	7:01:29 AM	PH3 valve closed
11/17/2011	7:01:29 AM	SiCl4 pre valve closed
11/17/2011	7:01:29 AM	SiCl4 post valve closed
11/17/2011	7:01:29 AM	Main Vac valve closed
11/17/2011	7:01:29 AM	Bypass valve closed
11/17/2011	7:01:29 AM	Bubbler valve closed
11/17/2011	7:01:29 AM	Helium MFC set to  0.000000
11/17/2011	7:01:29 AM	H2 MFC set to  0.000000
11/17/2011	7:01:29 AM	BCl3 MFC set to  0.000000
11/17/2011	7:01:29 AM	PHl3 MFC set to  0.000000
11/17/2011	7:01:29 AM	SiCl4 MFC set to  0.000000
11/17/2011	7:01:29 AM	Bypass solenoid MFC set to  0.000000
11/17/2011	7:01:29 AM	Tube furnace set to 0
11/17/2011	7:01:30 AM	Run finished at 7:01 AM
11/17/2011	7:01:30 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/17/2011	7:10:36 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/17/2011	7:10:37 AM	Recipe started at 7:10 AM
11/17/2011	7:10:37 AM	Helium valve closed
11/17/2011	7:10:37 AM	H2 valve closed
11/17/2011	7:10:37 AM	BCl3 valve closed
11/17/2011	7:10:37 AM	PH3 valve closed
11/17/2011	7:10:37 AM	SiCl4 pre valve closed
11/17/2011	7:10:37 AM	SiCl4 post valve closed
11/17/2011	7:10:37 AM	Main Vac valve closed
11/17/2011	7:10:37 AM	Bubbler valve closed
11/17/2011	7:10:37 AM	Bypass valve opened
11/17/2011	7:10:37 AM	Helium MFC set to  0.000000
11/17/2011	7:10:37 AM	H2 MFC set to  0.000000
11/17/2011	7:10:37 AM	BCl3 MFC set to  0.000000
11/17/2011	7:10:37 AM	PHl3 MFC set to  0.000000
11/17/2011	7:10:37 AM	SiCl4 MFC set to  0.000000
11/17/2011	7:10:37 AM	Bypass solenoid MFC set to  0.000000
11/17/2011	7:10:37 AM	Tube furnace set to 0
11/17/2011	7:12:14 AM	Helium valve closed
11/17/2011	7:12:14 AM	H2 valve closed
11/17/2011	7:12:14 AM	BCl3 valve closed
11/17/2011	7:12:14 AM	PH3 valve closed
11/17/2011	7:12:14 AM	SiCl4 pre valve closed
11/17/2011	7:12:14 AM	SiCl4 post valve closed
11/17/2011	7:12:14 AM	Main Vac valve closed
11/17/2011	7:12:14 AM	Bubbler valve closed
11/17/2011	7:12:14 AM	Bypass valve opened
11/17/2011	7:12:14 AM	Helium MFC set to  0.000000
11/17/2011	7:12:14 AM	H2 MFC set to  0.000000
11/17/2011	7:12:14 AM	BCl3 MFC set to  0.000000
11/17/2011	7:12:14 AM	PHl3 MFC set to  0.000000
11/17/2011	7:12:14 AM	SiCl4 MFC set to  0.000000
11/17/2011	7:12:14 AM	Bypass solenoid MFC set to  0.000000
11/17/2011	7:12:14 AM	Tube furnace set to 0
11/17/2011	7:13:14 AM	Helium valve closed
11/17/2011	7:13:14 AM	H2 valve closed
11/17/2011	7:13:14 AM	BCl3 valve closed
11/17/2011	7:13:14 AM	PH3 valve closed
11/17/2011	7:13:14 AM	SiCl4 pre valve closed
11/17/2011	7:13:14 AM	SiCl4 post valve closed
11/17/2011	7:13:14 AM	Bypass valve closed
11/17/2011	7:13:14 AM	Bubbler valve closed
11/17/2011	7:13:14 AM	Main Vac valve opened
11/17/2011	7:13:14 AM	Helium MFC set to  0.000000
11/17/2011	7:13:14 AM	H2 MFC set to  0.000000
11/17/2011	7:13:14 AM	BCl3 MFC set to  0.000000
11/17/2011	7:13:14 AM	PHl3 MFC set to  0.000000
11/17/2011	7:13:14 AM	SiCl4 MFC set to  0.000000
11/17/2011	7:13:14 AM	Bypass solenoid MFC set to  0.000000
11/17/2011	7:13:14 AM	Tube furnace set to 0
11/17/2011	7:13:15 AM	Run finished at 7:13 AM
11/17/2011	7:13:15 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/17/2011	8:10:50 AM	Helium MFC set to  20.000000
11/17/2011	8:10:51 AM	Helium valve opened
11/17/2011	8:11:29 AM	Tube furnace set to 50
11/17/2011	8:11:30 AM	Helium valve closed
11/17/2011	8:18:25 AM	Main Vac valve closed
11/17/2011	8:18:58 AM	Main Vac valve opened
11/17/2011	8:19:42 AM	Recipe started at 8:19 AM
11/17/2011	8:19:42 AM	Helium valve closed
11/17/2011	8:19:42 AM	H2 valve closed
11/17/2011	8:19:42 AM	BCl3 valve closed
11/17/2011	8:19:42 AM	PH3 valve closed
11/17/2011	8:19:42 AM	SiCl4 pre valve closed
11/17/2011	8:19:42 AM	SiCl4 post valve closed
11/17/2011	8:19:42 AM	Main Vac valve closed
11/17/2011	8:19:42 AM	Bypass valve closed
11/17/2011	8:19:42 AM	Bubbler valve closed
11/17/2011	8:19:42 AM	Helium MFC set to  0.000000
11/17/2011	8:19:42 AM	H2 MFC set to  0.000000
11/17/2011	8:19:42 AM	BCl3 MFC set to  0.000000
11/17/2011	8:19:42 AM	PHl3 MFC set to  0.000000
11/17/2011	8:19:42 AM	SiCl4 MFC set to  0.000000
11/17/2011	8:19:42 AM	Bypass solenoid MFC set to  0.000000
11/17/2011	8:19:42 AM	Tube furnace set to 0
11/17/2011	8:19:45 AM	Helium valve closed
11/17/2011	8:19:45 AM	BCl3 valve closed
11/17/2011	8:19:45 AM	PH3 valve closed
11/17/2011	8:19:45 AM	SiCl4 pre valve closed
11/17/2011	8:19:45 AM	SiCl4 post valve closed
11/17/2011	8:19:45 AM	Main Vac valve closed
11/17/2011	8:19:45 AM	Bypass valve closed
11/17/2011	8:19:45 AM	Bubbler valve closed
11/17/2011	8:19:45 AM	H2 valve opened
11/17/2011	8:19:45 AM	Helium MFC set to  0.000000
11/17/2011	8:19:45 AM	H2 MFC set to  500.000000
11/17/2011	8:19:45 AM	BCl3 MFC set to  0.000000
11/17/2011	8:19:45 AM	PHl3 MFC set to  0.000000
11/17/2011	8:19:45 AM	SiCl4 MFC set to  0.000000
11/17/2011	8:19:45 AM	Bypass solenoid MFC set to  0.000000
11/17/2011	8:19:45 AM	Tube furnace set to 50
11/17/2011	8:20:52 AM	Helium valve closed
11/17/2011	8:20:52 AM	BCl3 valve closed
11/17/2011	8:20:52 AM	PH3 valve closed
11/17/2011	8:20:52 AM	SiCl4 pre valve closed
11/17/2011	8:20:52 AM	SiCl4 post valve closed
11/17/2011	8:20:52 AM	Main Vac valve closed
11/17/2011	8:20:52 AM	Bypass valve closed
11/17/2011	8:20:52 AM	H2 valve opened
11/17/2011	8:20:52 AM	Bubbler valve opened
11/17/2011	8:20:52 AM	Helium MFC set to  0.000000
11/17/2011	8:20:52 AM	H2 MFC set to  500.000000
11/17/2011	8:20:52 AM	BCl3 MFC set to  0.000000
11/17/2011	8:20:52 AM	PHl3 MFC set to  0.000000
11/17/2011	8:20:52 AM	SiCl4 MFC set to  0.000000
11/17/2011	8:20:52 AM	Bypass solenoid MFC set to  0.000000
11/17/2011	8:20:52 AM	Tube furnace set to 50
11/17/2011	8:20:53 AM	Helium valve closed
11/17/2011	8:20:53 AM	BCl3 valve closed
11/17/2011	8:20:53 AM	PH3 valve closed
11/17/2011	8:20:53 AM	SiCl4 pre valve closed
11/17/2011	8:20:53 AM	SiCl4 post valve closed
11/17/2011	8:20:53 AM	Main Vac valve closed
11/17/2011	8:20:53 AM	Bypass valve closed
11/17/2011	8:20:53 AM	H2 valve opened
11/17/2011	8:20:53 AM	Bubbler valve opened
11/17/2011	8:20:53 AM	Helium MFC set to  0.000000
11/17/2011	8:20:53 AM	H2 MFC set to  450.000000
11/17/2011	8:20:53 AM	BCl3 MFC set to  0.000000
11/17/2011	8:20:53 AM	PHl3 MFC set to  0.000000
11/17/2011	8:20:53 AM	SiCl4 MFC set to  0.000000
11/17/2011	8:20:53 AM	Bypass solenoid MFC set to  0.000000
11/17/2011	8:20:54 AM	Tube furnace set to 1000
11/17/2011	8:43:54 AM	Helium valve closed
11/17/2011	8:43:54 AM	PH3 valve closed
11/17/2011	8:43:54 AM	Main Vac valve closed
11/17/2011	8:43:54 AM	Bypass valve closed
11/17/2011	8:43:54 AM	H2 valve opened
11/17/2011	8:43:54 AM	BCl3 valve opened
11/17/2011	8:43:54 AM	SiCl4 pre valve opened
11/17/2011	8:43:54 AM	SiCl4 post valve opened
11/17/2011	8:43:54 AM	Bubbler valve opened
11/17/2011	8:43:54 AM	Helium MFC set to  0.000000
11/17/2011	8:43:54 AM	H2 MFC set to  495.000000
11/17/2011	8:43:54 AM	BCl3 MFC set to  0.900000
11/17/2011	8:43:54 AM	PHl3 MFC set to  0.000000
11/17/2011	8:43:54 AM	SiCl4 MFC set to  25.000000
11/17/2011	8:43:54 AM	Bypass solenoid MFC set to  0.000000
11/17/2011	8:43:54 AM	Tube furnace set to 1000
11/17/2011	9:05:54 AM	Helium valve closed
11/17/2011	9:05:54 AM	BCl3 valve closed
11/17/2011	9:05:54 AM	PH3 valve closed
11/17/2011	9:05:54 AM	SiCl4 pre valve closed
11/17/2011	9:05:54 AM	SiCl4 post valve closed
11/17/2011	9:05:54 AM	Main Vac valve closed
11/17/2011	9:05:54 AM	Bypass valve closed
11/17/2011	9:05:54 AM	H2 valve opened
11/17/2011	9:05:54 AM	Bubbler valve opened
11/17/2011	9:05:54 AM	Helium MFC set to  0.000000
11/17/2011	9:05:54 AM	H2 MFC set to  500.000000
11/17/2011	9:05:54 AM	BCl3 MFC set to  0.000000
11/17/2011	9:05:54 AM	PHl3 MFC set to  0.000000
11/17/2011	9:05:54 AM	SiCl4 MFC set to  0.000000
11/17/2011	9:05:54 AM	Bypass solenoid MFC set to  0.000000
11/17/2011	9:05:54 AM	Tube furnace set to 750
11/17/2011	9:15:54 AM	H2 valve closed
11/17/2011	9:15:54 AM	BCl3 valve closed
11/17/2011	9:15:54 AM	PH3 valve closed
11/17/2011	9:15:54 AM	SiCl4 pre valve closed
11/17/2011	9:15:54 AM	SiCl4 post valve closed
11/17/2011	9:15:54 AM	Main Vac valve closed
11/17/2011	9:15:54 AM	Bypass valve closed
11/17/2011	9:15:54 AM	Helium valve opened
11/17/2011	9:15:54 AM	Bubbler valve opened
11/17/2011	9:15:54 AM	Helium MFC set to  400.000000
11/17/2011	9:15:54 AM	H2 MFC set to  0.000000
11/17/2011	9:15:54 AM	BCl3 MFC set to  0.000000
11/17/2011	9:15:54 AM	PHl3 MFC set to  0.000000
11/17/2011	9:15:54 AM	SiCl4 MFC set to  0.000000
11/17/2011	9:15:54 AM	Bypass solenoid MFC set to  0.000000
11/17/2011	9:15:54 AM	Tube furnace set to 0
11/17/2011	9:37:20 AM	Helium valve closed
11/17/2011	9:37:20 AM	H2 valve closed
11/17/2011	9:37:20 AM	BCl3 valve closed
11/17/2011	9:37:20 AM	PH3 valve closed
11/17/2011	9:37:20 AM	SiCl4 pre valve closed
11/17/2011	9:37:20 AM	SiCl4 post valve closed
11/17/2011	9:37:20 AM	Main Vac valve closed
11/17/2011	9:37:20 AM	Bypass valve closed
11/17/2011	9:37:20 AM	Bubbler valve closed
11/17/2011	9:37:20 AM	Helium MFC set to  0.000000
11/17/2011	9:37:20 AM	H2 MFC set to  0.000000
11/17/2011	9:37:20 AM	BCl3 MFC set to  0.000000
11/17/2011	9:37:20 AM	PHl3 MFC set to  0.000000
11/17/2011	9:37:20 AM	SiCl4 MFC set to  0.000000
11/17/2011	9:37:20 AM	Bypass solenoid MFC set to  0.000000
11/17/2011	9:37:20 AM	Tube furnace set to 50
11/17/2011	9:39:28 AM	Run aborted at 9:39 AM
11/17/2011	9:39:28 AM	Helium valve closed
11/17/2011	9:39:28 AM	H2 valve closed
11/17/2011	9:39:28 AM	BCl3 valve closed
11/17/2011	9:39:28 AM	PH3 valve closed
11/17/2011	9:39:28 AM	SiCl4 pre valve closed
11/17/2011	9:39:28 AM	SiCl4 post valve closed
11/17/2011	9:39:28 AM	Bypass valve closed
11/17/2011	9:39:28 AM	Main Vac valve closed
11/17/2011	9:39:28 AM	Bubbler valve closed
11/17/2011	9:39:28 AM	Helium MFC set to  0.000000
11/17/2011	9:39:28 AM	H2 MFC set to  0.000000
11/17/2011	9:39:28 AM	BCl3 MFC set to  0.000000
11/17/2011	9:39:28 AM	PHl3 MFC set to  0.000000
11/17/2011	9:39:28 AM	SiCl4 MFC set to  0.000000
11/17/2011	9:39:28 AM	Tube furnace set to 0
11/17/2011	9:39:30 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/17/2011	9:39:31 AM	Recipe started at 9:39 AM
11/17/2011	9:39:31 AM	Helium valve closed
11/17/2011	9:39:31 AM	H2 valve closed
11/17/2011	9:39:31 AM	BCl3 valve closed
11/17/2011	9:39:31 AM	PH3 valve closed
11/17/2011	9:39:31 AM	SiCl4 pre valve closed
11/17/2011	9:39:31 AM	SiCl4 post valve closed
11/17/2011	9:39:31 AM	Main Vac valve closed
11/17/2011	9:39:31 AM	Bubbler valve closed
11/17/2011	9:39:31 AM	Bypass valve opened
11/17/2011	9:39:31 AM	Helium MFC set to  0.000000
11/17/2011	9:39:31 AM	H2 MFC set to  0.000000
11/17/2011	9:39:31 AM	BCl3 MFC set to  0.000000
11/17/2011	9:39:31 AM	PHl3 MFC set to  0.000000
11/17/2011	9:39:31 AM	SiCl4 MFC set to  0.000000
11/17/2011	9:39:31 AM	Bypass solenoid MFC set to  0.000000
11/17/2011	9:39:31 AM	Tube furnace set to 0
11/17/2011	9:40:57 AM	Helium valve closed
11/17/2011	9:40:57 AM	H2 valve closed
11/17/2011	9:40:57 AM	BCl3 valve closed
11/17/2011	9:40:57 AM	PH3 valve closed
11/17/2011	9:40:57 AM	SiCl4 pre valve closed
11/17/2011	9:40:57 AM	SiCl4 post valve closed
11/17/2011	9:40:57 AM	Main Vac valve closed
11/17/2011	9:40:57 AM	Bubbler valve closed
11/17/2011	9:40:57 AM	Bypass valve opened
11/17/2011	9:40:57 AM	Helium MFC set to  0.000000
11/17/2011	9:40:57 AM	H2 MFC set to  0.000000
11/17/2011	9:40:57 AM	BCl3 MFC set to  0.000000
11/17/2011	9:40:57 AM	PHl3 MFC set to  0.000000
11/17/2011	9:40:57 AM	SiCl4 MFC set to  0.000000
11/17/2011	9:40:57 AM	Bypass solenoid MFC set to  0.000000
11/17/2011	9:40:57 AM	Tube furnace set to 0
11/17/2011	9:41:57 AM	Helium valve closed
11/17/2011	9:41:57 AM	H2 valve closed
11/17/2011	9:41:57 AM	BCl3 valve closed
11/17/2011	9:41:57 AM	PH3 valve closed
11/17/2011	9:41:57 AM	SiCl4 pre valve closed
11/17/2011	9:41:57 AM	SiCl4 post valve closed
11/17/2011	9:41:57 AM	Bypass valve closed
11/17/2011	9:41:57 AM	Bubbler valve closed
11/17/2011	9:41:57 AM	Main Vac valve opened
11/17/2011	9:41:57 AM	Helium MFC set to  0.000000
11/17/2011	9:41:57 AM	H2 MFC set to  0.000000
11/17/2011	9:41:57 AM	BCl3 MFC set to  0.000000
11/17/2011	9:41:57 AM	PHl3 MFC set to  0.000000
11/17/2011	9:41:57 AM	SiCl4 MFC set to  0.000000
11/17/2011	9:41:57 AM	Bypass solenoid MFC set to  0.000000
11/17/2011	9:41:57 AM	Tube furnace set to 0
11/17/2011	9:41:58 AM	Run finished at 9:41 AM
11/17/2011	9:41:58 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/17/2011	10:53:52 AM	Main Vac valve closed
11/17/2011	10:54:02 AM	Main Vac valve opened
11/17/2011	10:54:11 AM	Main Vac valve closed
11/17/2011	10:54:46 AM	Main Vac valve opened
11/17/2011	10:55:10 AM	Recipe started at 10:55 AM
11/17/2011	10:55:10 AM	Helium valve closed
11/17/2011	10:55:10 AM	H2 valve closed
11/17/2011	10:55:10 AM	BCl3 valve closed
11/17/2011	10:55:10 AM	PH3 valve closed
11/17/2011	10:55:10 AM	SiCl4 pre valve closed
11/17/2011	10:55:10 AM	SiCl4 post valve closed
11/17/2011	10:55:10 AM	Main Vac valve closed
11/17/2011	10:55:10 AM	Bypass valve closed
11/17/2011	10:55:10 AM	Bubbler valve closed
11/17/2011	10:55:10 AM	Helium MFC set to  0.000000
11/17/2011	10:55:10 AM	H2 MFC set to  0.000000
11/17/2011	10:55:10 AM	BCl3 MFC set to  0.000000
11/17/2011	10:55:10 AM	PHl3 MFC set to  0.000000
11/17/2011	10:55:10 AM	SiCl4 MFC set to  0.000000
11/17/2011	10:55:10 AM	Bypass solenoid MFC set to  0.000000
11/17/2011	10:55:10 AM	Tube furnace set to 0
11/17/2011	10:55:14 AM	Helium valve closed
11/17/2011	10:55:14 AM	BCl3 valve closed
11/17/2011	10:55:14 AM	PH3 valve closed
11/17/2011	10:55:14 AM	SiCl4 pre valve closed
11/17/2011	10:55:14 AM	SiCl4 post valve closed
11/17/2011	10:55:14 AM	Main Vac valve closed
11/17/2011	10:55:14 AM	Bypass valve closed
11/17/2011	10:55:14 AM	Bubbler valve closed
11/17/2011	10:55:14 AM	H2 valve opened
11/17/2011	10:55:14 AM	Helium MFC set to  0.000000
11/17/2011	10:55:14 AM	H2 MFC set to  500.000000
11/17/2011	10:55:14 AM	BCl3 MFC set to  0.000000
11/17/2011	10:55:14 AM	PHl3 MFC set to  0.000000
11/17/2011	10:55:14 AM	SiCl4 MFC set to  0.000000
11/17/2011	10:55:14 AM	Bypass solenoid MFC set to  0.000000
11/17/2011	10:55:14 AM	Tube furnace set to 50
11/17/2011	10:56:21 AM	Helium valve closed
11/17/2011	10:56:21 AM	BCl3 valve closed
11/17/2011	10:56:21 AM	PH3 valve closed
11/17/2011	10:56:21 AM	SiCl4 pre valve closed
11/17/2011	10:56:21 AM	SiCl4 post valve closed
11/17/2011	10:56:21 AM	Main Vac valve closed
11/17/2011	10:56:21 AM	Bypass valve closed
11/17/2011	10:56:21 AM	H2 valve opened
11/17/2011	10:56:21 AM	Bubbler valve opened
11/17/2011	10:56:21 AM	Helium MFC set to  0.000000
11/17/2011	10:56:21 AM	H2 MFC set to  500.000000
11/17/2011	10:56:21 AM	BCl3 MFC set to  0.000000
11/17/2011	10:56:21 AM	PHl3 MFC set to  0.000000
11/17/2011	10:56:21 AM	SiCl4 MFC set to  0.000000
11/17/2011	10:56:21 AM	Bypass solenoid MFC set to  0.000000
11/17/2011	10:56:21 AM	Tube furnace set to 50
11/17/2011	10:56:22 AM	Helium valve closed
11/17/2011	10:56:22 AM	BCl3 valve closed
11/17/2011	10:56:22 AM	PH3 valve closed
11/17/2011	10:56:22 AM	SiCl4 pre valve closed
11/17/2011	10:56:22 AM	SiCl4 post valve closed
11/17/2011	10:56:22 AM	Main Vac valve closed
11/17/2011	10:56:22 AM	Bypass valve closed
11/17/2011	10:56:22 AM	H2 valve opened
11/17/2011	10:56:22 AM	Bubbler valve opened
11/17/2011	10:56:22 AM	Helium MFC set to  0.000000
11/17/2011	10:56:22 AM	H2 MFC set to  450.000000
11/17/2011	10:56:22 AM	BCl3 MFC set to  0.000000
11/17/2011	10:56:22 AM	PHl3 MFC set to  0.000000
11/17/2011	10:56:22 AM	SiCl4 MFC set to  0.000000
11/17/2011	10:56:22 AM	Bypass solenoid MFC set to  0.000000
11/17/2011	10:56:23 AM	Tube furnace set to 1000
11/17/2011	11:19:23 AM	Helium valve closed
11/17/2011	11:19:23 AM	PH3 valve closed
11/17/2011	11:19:23 AM	Main Vac valve closed
11/17/2011	11:19:23 AM	Bypass valve closed
11/17/2011	11:19:23 AM	H2 valve opened
11/17/2011	11:19:23 AM	BCl3 valve opened
11/17/2011	11:19:23 AM	SiCl4 pre valve opened
11/17/2011	11:19:23 AM	SiCl4 post valve opened
11/17/2011	11:19:23 AM	Bubbler valve opened
11/17/2011	11:19:23 AM	Helium MFC set to  0.000000
11/17/2011	11:19:23 AM	H2 MFC set to  495.000000
11/17/2011	11:19:23 AM	BCl3 MFC set to  1.200000
11/17/2011	11:19:23 AM	PHl3 MFC set to  0.000000
11/17/2011	11:19:23 AM	SiCl4 MFC set to  25.000000
11/17/2011	11:19:23 AM	Bypass solenoid MFC set to  0.000000
11/17/2011	11:19:23 AM	Tube furnace set to 1000
11/17/2011	11:41:23 AM	Helium valve closed
11/17/2011	11:41:23 AM	BCl3 valve closed
11/17/2011	11:41:23 AM	PH3 valve closed
11/17/2011	11:41:23 AM	SiCl4 pre valve closed
11/17/2011	11:41:23 AM	SiCl4 post valve closed
11/17/2011	11:41:23 AM	Main Vac valve closed
11/17/2011	11:41:23 AM	Bypass valve closed
11/17/2011	11:41:23 AM	H2 valve opened
11/17/2011	11:41:23 AM	Bubbler valve opened
11/17/2011	11:41:23 AM	Helium MFC set to  0.000000
11/17/2011	11:41:23 AM	H2 MFC set to  500.000000
11/17/2011	11:41:23 AM	BCl3 MFC set to  0.000000
11/17/2011	11:41:23 AM	PHl3 MFC set to  0.000000
11/17/2011	11:41:23 AM	SiCl4 MFC set to  0.000000
11/17/2011	11:41:23 AM	Bypass solenoid MFC set to  0.000000
11/17/2011	11:41:23 AM	Tube furnace set to 750
11/17/2011	11:51:23 AM	H2 valve closed
11/17/2011	11:51:23 AM	BCl3 valve closed
11/17/2011	11:51:23 AM	PH3 valve closed
11/17/2011	11:51:23 AM	SiCl4 pre valve closed
11/17/2011	11:51:23 AM	SiCl4 post valve closed
11/17/2011	11:51:23 AM	Main Vac valve closed
11/17/2011	11:51:23 AM	Bypass valve closed
11/17/2011	11:51:23 AM	Helium valve opened
11/17/2011	11:51:23 AM	Bubbler valve opened
11/17/2011	11:51:23 AM	Helium MFC set to  400.000000
11/17/2011	11:51:23 AM	H2 MFC set to  0.000000
11/17/2011	11:51:23 AM	BCl3 MFC set to  0.000000
11/17/2011	11:51:23 AM	PHl3 MFC set to  0.000000
11/17/2011	11:51:23 AM	SiCl4 MFC set to  0.000000
11/17/2011	11:51:23 AM	Bypass solenoid MFC set to  0.000000
11/17/2011	11:51:23 AM	Tube furnace set to 0
11/17/2011	12:16:23 PM	Helium valve closed
11/17/2011	12:16:23 PM	H2 valve closed
11/17/2011	12:16:23 PM	BCl3 valve closed
11/17/2011	12:16:23 PM	PH3 valve closed
11/17/2011	12:16:23 PM	SiCl4 pre valve closed
11/17/2011	12:16:23 PM	SiCl4 post valve closed
11/17/2011	12:16:23 PM	Main Vac valve closed
11/17/2011	12:16:23 PM	Bypass valve closed
11/17/2011	12:16:23 PM	Bubbler valve closed
11/17/2011	12:16:23 PM	Helium MFC set to  0.000000
11/17/2011	12:16:23 PM	H2 MFC set to  0.000000
11/17/2011	12:16:23 PM	BCl3 MFC set to  0.000000
11/17/2011	12:16:23 PM	PHl3 MFC set to  0.000000
11/17/2011	12:16:23 PM	SiCl4 MFC set to  0.000000
11/17/2011	12:16:23 PM	Bypass solenoid MFC set to  0.000000
11/17/2011	12:16:23 PM	Tube furnace set to 50
11/17/2011	12:21:23 PM	Helium valve closed
11/17/2011	12:21:23 PM	H2 valve closed
11/17/2011	12:21:23 PM	BCl3 valve closed
11/17/2011	12:21:23 PM	PH3 valve closed
11/17/2011	12:21:23 PM	SiCl4 pre valve closed
11/17/2011	12:21:23 PM	SiCl4 post valve closed
11/17/2011	12:21:23 PM	Main Vac valve closed
11/17/2011	12:21:23 PM	Bubbler valve closed
11/17/2011	12:21:23 PM	Bypass valve opened
11/17/2011	12:21:23 PM	Helium MFC set to  0.000000
11/17/2011	12:21:23 PM	H2 MFC set to  0.000000
11/17/2011	12:21:23 PM	BCl3 MFC set to  0.000000
11/17/2011	12:21:23 PM	PHl3 MFC set to  0.000000
11/17/2011	12:21:23 PM	SiCl4 MFC set to  0.000000
11/17/2011	12:21:23 PM	Bypass solenoid MFC set to  0.000000
11/17/2011	12:21:23 PM	Tube furnace set to 0
11/17/2011	12:26:23 PM	Helium valve closed
11/17/2011	12:26:23 PM	H2 valve closed
11/17/2011	12:26:23 PM	BCl3 valve closed
11/17/2011	12:26:23 PM	PH3 valve closed
11/17/2011	12:26:23 PM	SiCl4 pre valve closed
11/17/2011	12:26:23 PM	SiCl4 post valve closed
11/17/2011	12:26:23 PM	Bypass valve closed
11/17/2011	12:26:23 PM	Bubbler valve closed
11/17/2011	12:26:23 PM	Main Vac valve opened
11/17/2011	12:26:23 PM	Helium MFC set to  0.000000
11/17/2011	12:26:23 PM	H2 MFC set to  0.000000
11/17/2011	12:26:23 PM	BCl3 MFC set to  0.000000
11/17/2011	12:26:23 PM	PHl3 MFC set to  0.000000
11/17/2011	12:26:23 PM	SiCl4 MFC set to  0.000000
11/17/2011	12:26:23 PM	Bypass solenoid MFC set to  0.000000
11/17/2011	12:26:24 PM	Tube furnace set to 0
11/17/2011	12:26:25 PM	Run finished at 12:26 PM
11/17/2011	5:18:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/17/2011	5:18:24 PM	Recipe started at 5:18 PM
11/17/2011	5:18:24 PM	Helium valve closed
11/17/2011	5:18:24 PM	H2 valve closed
11/17/2011	5:18:24 PM	BCl3 valve closed
11/17/2011	5:18:24 PM	PH3 valve closed
11/17/2011	5:18:24 PM	SiCl4 pre valve closed
11/17/2011	5:18:24 PM	SiCl4 post valve closed
11/17/2011	5:18:24 PM	Main Vac valve closed
11/17/2011	5:18:24 PM	Bypass valve closed
11/17/2011	5:18:24 PM	Bubbler valve closed
11/17/2011	5:18:24 PM	Helium MFC set to  0.000000
11/17/2011	5:18:24 PM	H2 MFC set to  0.000000
11/17/2011	5:18:24 PM	BCl3 MFC set to  0.000000
11/17/2011	5:18:24 PM	PHl3 MFC set to  0.000000
11/17/2011	5:18:24 PM	SiCl4 MFC set to  0.000000
11/17/2011	5:18:24 PM	Bypass solenoid MFC set to  0.000000
11/17/2011	5:18:24 PM	Tube furnace set to 0
11/17/2011	5:18:27 PM	H2 valve closed
11/17/2011	5:18:27 PM	BCl3 valve closed
11/17/2011	5:18:27 PM	PH3 valve closed
11/17/2011	5:18:27 PM	SiCl4 pre valve closed
11/17/2011	5:18:27 PM	SiCl4 post valve closed
11/17/2011	5:18:27 PM	Main Vac valve closed
11/17/2011	5:18:27 PM	Bypass valve closed
11/17/2011	5:18:27 PM	Bubbler valve closed
11/17/2011	5:18:27 PM	Helium valve opened
11/17/2011	5:18:27 PM	Helium MFC set to  500.000000
11/17/2011	5:18:27 PM	H2 MFC set to  0.000000
11/17/2011	5:18:27 PM	BCl3 MFC set to  0.000000
11/17/2011	5:18:27 PM	PHl3 MFC set to  0.000000
11/17/2011	5:18:27 PM	SiCl4 MFC set to  0.000000
11/17/2011	5:18:27 PM	Bypass solenoid MFC set to  0.000000
11/17/2011	5:18:27 PM	Tube furnace set to 0
11/17/2011	5:19:32 PM	Helium valve closed
11/17/2011	5:19:32 PM	H2 valve closed
11/17/2011	5:19:32 PM	BCl3 valve closed
11/17/2011	5:19:32 PM	PH3 valve closed
11/17/2011	5:19:32 PM	SiCl4 pre valve closed
11/17/2011	5:19:32 PM	SiCl4 post valve closed
11/17/2011	5:19:32 PM	Main Vac valve closed
11/17/2011	5:19:32 PM	Bypass valve closed
11/17/2011	5:19:32 PM	Bubbler valve closed
11/17/2011	5:19:32 PM	Helium MFC set to  0.000000
11/17/2011	5:19:32 PM	H2 MFC set to  0.000000
11/17/2011	5:19:32 PM	BCl3 MFC set to  0.000000
11/17/2011	5:19:32 PM	PHl3 MFC set to  0.000000
11/17/2011	5:19:32 PM	SiCl4 MFC set to  0.000000
11/17/2011	5:19:32 PM	Bypass solenoid MFC set to  0.000000
11/17/2011	5:19:32 PM	Tube furnace set to 0
11/17/2011	5:19:33 PM	Run finished at 5:19 PM
11/17/2011	5:19:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/17/2011	5:23:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/17/2011	5:23:45 PM	Recipe started at 5:23 PM
11/17/2011	5:23:45 PM	Helium valve closed
11/17/2011	5:23:45 PM	H2 valve closed
11/17/2011	5:23:45 PM	BCl3 valve closed
11/17/2011	5:23:45 PM	PH3 valve closed
11/17/2011	5:23:45 PM	SiCl4 pre valve closed
11/17/2011	5:23:45 PM	SiCl4 post valve closed
11/17/2011	5:23:45 PM	Main Vac valve closed
11/17/2011	5:23:45 PM	Bubbler valve closed
11/17/2011	5:23:45 PM	Bypass valve opened
11/17/2011	5:23:45 PM	Helium MFC set to  0.000000
11/17/2011	5:23:45 PM	H2 MFC set to  0.000000
11/17/2011	5:23:45 PM	BCl3 MFC set to  0.000000
11/17/2011	5:23:45 PM	PHl3 MFC set to  0.000000
11/17/2011	5:23:45 PM	SiCl4 MFC set to  0.000000
11/17/2011	5:23:45 PM	Bypass solenoid MFC set to  0.000000
11/17/2011	5:23:46 PM	Tube furnace set to 0
11/17/2011	5:25:23 PM	Helium valve closed
11/17/2011	5:25:23 PM	H2 valve closed
11/17/2011	5:25:23 PM	BCl3 valve closed
11/17/2011	5:25:23 PM	PH3 valve closed
11/17/2011	5:25:23 PM	SiCl4 pre valve closed
11/17/2011	5:25:23 PM	SiCl4 post valve closed
11/17/2011	5:25:23 PM	Main Vac valve closed
11/17/2011	5:25:23 PM	Bubbler valve closed
11/17/2011	5:25:23 PM	Bypass valve opened
11/17/2011	5:25:23 PM	Helium MFC set to  0.000000
11/17/2011	5:25:23 PM	H2 MFC set to  0.000000
11/17/2011	5:25:23 PM	BCl3 MFC set to  0.000000
11/17/2011	5:25:23 PM	PHl3 MFC set to  0.000000
11/17/2011	5:25:23 PM	SiCl4 MFC set to  0.000000
11/17/2011	5:25:23 PM	Bypass solenoid MFC set to  0.000000
11/17/2011	5:25:24 PM	Tube furnace set to 0
11/17/2011	5:26:24 PM	Helium valve closed
11/17/2011	5:26:24 PM	H2 valve closed
11/17/2011	5:26:24 PM	BCl3 valve closed
11/17/2011	5:26:24 PM	PH3 valve closed
11/17/2011	5:26:24 PM	SiCl4 pre valve closed
11/17/2011	5:26:24 PM	SiCl4 post valve closed
11/17/2011	5:26:24 PM	Bypass valve closed
11/17/2011	5:26:24 PM	Bubbler valve closed
11/17/2011	5:26:24 PM	Main Vac valve opened
11/17/2011	5:26:24 PM	Helium MFC set to  0.000000
11/17/2011	5:26:24 PM	H2 MFC set to  0.000000
11/17/2011	5:26:24 PM	BCl3 MFC set to  0.000000
11/17/2011	5:26:24 PM	PHl3 MFC set to  0.000000
11/17/2011	5:26:24 PM	SiCl4 MFC set to  0.000000
11/17/2011	5:26:24 PM	Bypass solenoid MFC set to  0.000000
11/17/2011	5:26:24 PM	Tube furnace set to 0
11/17/2011	5:26:25 PM	Run finished at 5:26 PM
11/17/2011	5:26:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/17/2011	6:54:41 PM	Tube furnace set to 50
11/17/2011	6:54:43 PM	Helium MFC set to  20.000000
11/17/2011	6:54:45 PM	Helium valve opened
11/17/2011	6:55:17 PM	Helium valve closed
11/17/2011	6:56:32 PM	Helium MFC set to  0.000000
11/17/2011	6:56:36 PM	Main Vac valve closed
11/17/2011	6:57:00 PM	Main Vac valve opened
11/17/2011	6:58:03 PM	Recipe started at 6:58 PM
11/17/2011	6:58:04 PM	Helium valve closed
11/17/2011	6:58:04 PM	H2 valve closed
11/17/2011	6:58:04 PM	BCl3 valve closed
11/17/2011	6:58:04 PM	PH3 valve closed
11/17/2011	6:58:04 PM	SiCl4 pre valve closed
11/17/2011	6:58:04 PM	SiCl4 post valve closed
11/17/2011	6:58:04 PM	Main Vac valve closed
11/17/2011	6:58:04 PM	Bypass valve closed
11/17/2011	6:58:04 PM	Bubbler valve closed
11/17/2011	6:58:04 PM	Helium MFC set to  0.000000
11/17/2011	6:58:04 PM	H2 MFC set to  0.000000
11/17/2011	6:58:04 PM	BCl3 MFC set to  0.000000
11/17/2011	6:58:04 PM	PHl3 MFC set to  0.000000
11/17/2011	6:58:04 PM	SiCl4 MFC set to  0.000000
11/17/2011	6:58:04 PM	Bypass solenoid MFC set to  0.000000
11/17/2011	6:58:04 PM	Tube furnace set to 0
11/17/2011	6:58:07 PM	Helium valve closed
11/17/2011	6:58:07 PM	BCl3 valve closed
11/17/2011	6:58:07 PM	PH3 valve closed
11/17/2011	6:58:07 PM	SiCl4 pre valve closed
11/17/2011	6:58:07 PM	SiCl4 post valve closed
11/17/2011	6:58:07 PM	Main Vac valve closed
11/17/2011	6:58:07 PM	Bypass valve closed
11/17/2011	6:58:07 PM	Bubbler valve closed
11/17/2011	6:58:07 PM	H2 valve opened
11/17/2011	6:58:07 PM	Helium MFC set to  0.000000
11/17/2011	6:58:07 PM	H2 MFC set to  500.000000
11/17/2011	6:58:07 PM	BCl3 MFC set to  0.000000
11/17/2011	6:58:07 PM	PHl3 MFC set to  0.000000
11/17/2011	6:58:07 PM	SiCl4 MFC set to  0.000000
11/17/2011	6:58:07 PM	Bypass solenoid MFC set to  0.000000
11/17/2011	6:58:07 PM	Tube furnace set to 50
11/17/2011	6:59:14 PM	Helium valve closed
11/17/2011	6:59:14 PM	BCl3 valve closed
11/17/2011	6:59:14 PM	PH3 valve closed
11/17/2011	6:59:14 PM	SiCl4 pre valve closed
11/17/2011	6:59:14 PM	SiCl4 post valve closed
11/17/2011	6:59:14 PM	Main Vac valve closed
11/17/2011	6:59:14 PM	Bypass valve closed
11/17/2011	6:59:14 PM	H2 valve opened
11/17/2011	6:59:14 PM	Bubbler valve opened
11/17/2011	6:59:14 PM	Helium MFC set to  0.000000
11/17/2011	6:59:14 PM	H2 MFC set to  500.000000
11/17/2011	6:59:14 PM	BCl3 MFC set to  0.000000
11/17/2011	6:59:14 PM	PHl3 MFC set to  0.000000
11/17/2011	6:59:14 PM	SiCl4 MFC set to  0.000000
11/17/2011	6:59:14 PM	Bypass solenoid MFC set to  0.000000
11/17/2011	6:59:14 PM	Tube furnace set to 50
11/17/2011	6:59:15 PM	Helium valve closed
11/17/2011	6:59:15 PM	BCl3 valve closed
11/17/2011	6:59:15 PM	PH3 valve closed
11/17/2011	6:59:15 PM	SiCl4 pre valve closed
11/17/2011	6:59:15 PM	SiCl4 post valve closed
11/17/2011	6:59:15 PM	Main Vac valve closed
11/17/2011	6:59:15 PM	Bypass valve closed
11/17/2011	6:59:15 PM	H2 valve opened
11/17/2011	6:59:15 PM	Bubbler valve opened
11/17/2011	6:59:15 PM	Helium MFC set to  0.000000
11/17/2011	6:59:15 PM	H2 MFC set to  450.000000
11/17/2011	6:59:15 PM	BCl3 MFC set to  0.000000
11/17/2011	6:59:15 PM	PHl3 MFC set to  0.000000
11/17/2011	6:59:15 PM	SiCl4 MFC set to  0.000000
11/17/2011	6:59:15 PM	Bypass solenoid MFC set to  0.000000
11/17/2011	6:59:15 PM	Tube furnace set to 1000
11/17/2011	7:22:15 PM	Helium valve closed
11/17/2011	7:22:15 PM	PH3 valve closed
11/17/2011	7:22:15 PM	Main Vac valve closed
11/17/2011	7:22:15 PM	Bypass valve closed
11/17/2011	7:22:15 PM	H2 valve opened
11/17/2011	7:22:15 PM	BCl3 valve opened
11/17/2011	7:22:15 PM	SiCl4 pre valve opened
11/17/2011	7:22:15 PM	SiCl4 post valve opened
11/17/2011	7:22:15 PM	Bubbler valve opened
11/17/2011	7:22:15 PM	Helium MFC set to  0.000000
11/17/2011	7:22:15 PM	H2 MFC set to  495.000000
11/17/2011	7:22:15 PM	BCl3 MFC set to  1.000000
11/17/2011	7:22:15 PM	PHl3 MFC set to  0.000000
11/17/2011	7:22:15 PM	SiCl4 MFC set to  25.000000
11/17/2011	7:22:15 PM	Bypass solenoid MFC set to  0.000000
11/17/2011	7:22:15 PM	Tube furnace set to 1000
11/17/2011	7:44:15 PM	Helium valve closed
11/17/2011	7:44:15 PM	BCl3 valve closed
11/17/2011	7:44:15 PM	PH3 valve closed
11/17/2011	7:44:15 PM	SiCl4 pre valve closed
11/17/2011	7:44:15 PM	SiCl4 post valve closed
11/17/2011	7:44:15 PM	Main Vac valve closed
11/17/2011	7:44:15 PM	Bypass valve closed
11/17/2011	7:44:15 PM	H2 valve opened
11/17/2011	7:44:15 PM	Bubbler valve opened
11/17/2011	7:44:15 PM	Helium MFC set to  0.000000
11/17/2011	7:44:15 PM	H2 MFC set to  500.000000
11/17/2011	7:44:15 PM	BCl3 MFC set to  0.000000
11/17/2011	7:44:15 PM	PHl3 MFC set to  0.000000
11/17/2011	7:44:15 PM	SiCl4 MFC set to  0.000000
11/17/2011	7:44:15 PM	Bypass solenoid MFC set to  0.000000
11/17/2011	7:44:15 PM	Tube furnace set to 750
11/17/2011	7:54:15 PM	H2 valve closed
11/17/2011	7:54:15 PM	BCl3 valve closed
11/17/2011	7:54:15 PM	PH3 valve closed
11/17/2011	7:54:15 PM	SiCl4 pre valve closed
11/17/2011	7:54:15 PM	SiCl4 post valve closed
11/17/2011	7:54:15 PM	Main Vac valve closed
11/17/2011	7:54:15 PM	Bypass valve closed
11/17/2011	7:54:15 PM	Helium valve opened
11/17/2011	7:54:15 PM	Bubbler valve opened
11/17/2011	7:54:15 PM	Helium MFC set to  400.000000
11/17/2011	7:54:15 PM	H2 MFC set to  0.000000
11/17/2011	7:54:15 PM	BCl3 MFC set to  0.000000
11/17/2011	7:54:15 PM	PHl3 MFC set to  0.000000
11/17/2011	7:54:15 PM	SiCl4 MFC set to  0.000000
11/17/2011	7:54:15 PM	Bypass solenoid MFC set to  0.000000
11/17/2011	7:54:16 PM	Tube furnace set to 0
11/17/2011	8:19:15 PM	Helium valve closed
11/17/2011	8:19:15 PM	H2 valve closed
11/17/2011	8:19:15 PM	BCl3 valve closed
11/17/2011	8:19:15 PM	PH3 valve closed
11/17/2011	8:19:15 PM	SiCl4 pre valve closed
11/17/2011	8:19:15 PM	SiCl4 post valve closed
11/17/2011	8:19:15 PM	Main Vac valve closed
11/17/2011	8:19:15 PM	Bypass valve closed
11/17/2011	8:19:16 PM	Bubbler valve closed
11/17/2011	8:19:16 PM	Helium MFC set to  0.000000
11/17/2011	8:19:16 PM	H2 MFC set to  0.000000
11/17/2011	8:19:16 PM	BCl3 MFC set to  0.000000
11/17/2011	8:19:16 PM	PHl3 MFC set to  0.000000
11/17/2011	8:19:16 PM	SiCl4 MFC set to  0.000000
11/17/2011	8:19:16 PM	Bypass solenoid MFC set to  0.000000
11/17/2011	8:19:16 PM	Tube furnace set to 50
11/17/2011	8:24:16 PM	Helium valve closed
11/17/2011	8:24:16 PM	H2 valve closed
11/17/2011	8:24:16 PM	BCl3 valve closed
11/17/2011	8:24:16 PM	PH3 valve closed
11/17/2011	8:24:16 PM	SiCl4 pre valve closed
11/17/2011	8:24:16 PM	SiCl4 post valve closed
11/17/2011	8:24:16 PM	Main Vac valve closed
11/17/2011	8:24:16 PM	Bubbler valve closed
11/17/2011	8:24:16 PM	Bypass valve opened
11/17/2011	8:24:16 PM	Helium MFC set to  0.000000
11/17/2011	8:24:16 PM	H2 MFC set to  0.000000
11/17/2011	8:24:16 PM	BCl3 MFC set to  0.000000
11/17/2011	8:24:16 PM	PHl3 MFC set to  0.000000
11/17/2011	8:24:16 PM	SiCl4 MFC set to  0.000000
11/17/2011	8:24:16 PM	Bypass solenoid MFC set to  0.000000
11/17/2011	8:24:16 PM	Tube furnace set to 0
11/17/2011	8:24:32 PM	Run aborted at 8:24 PM
11/17/2011	8:24:32 PM	Helium valve closed
11/17/2011	8:24:32 PM	H2 valve closed
11/17/2011	8:24:32 PM	BCl3 valve closed
11/17/2011	8:24:32 PM	PH3 valve closed
11/17/2011	8:24:32 PM	SiCl4 pre valve closed
11/17/2011	8:24:32 PM	SiCl4 post valve closed
11/17/2011	8:24:32 PM	Bypass valve closed
11/17/2011	8:24:32 PM	Main Vac valve closed
11/17/2011	8:24:32 PM	Bubbler valve closed
11/17/2011	8:24:32 PM	Helium MFC set to  0.000000
11/17/2011	8:24:32 PM	H2 MFC set to  0.000000
11/17/2011	8:24:32 PM	BCl3 MFC set to  0.000000
11/17/2011	8:24:32 PM	PHl3 MFC set to  0.000000
11/17/2011	8:24:32 PM	SiCl4 MFC set to  0.000000
11/17/2011	8:24:33 PM	Tube furnace set to 0
11/17/2011	8:24:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/17/2011	8:24:37 PM	Recipe started at 8:24 PM
11/17/2011	8:24:37 PM	Helium valve closed
11/17/2011	8:24:37 PM	H2 valve closed
11/17/2011	8:24:37 PM	BCl3 valve closed
11/17/2011	8:24:37 PM	PH3 valve closed
11/17/2011	8:24:37 PM	SiCl4 pre valve closed
11/17/2011	8:24:37 PM	SiCl4 post valve closed
11/17/2011	8:24:37 PM	Main Vac valve closed
11/17/2011	8:24:37 PM	Bypass valve closed
11/17/2011	8:24:37 PM	Bubbler valve closed
11/17/2011	8:24:37 PM	Helium MFC set to  0.000000
11/17/2011	8:24:37 PM	H2 MFC set to  0.000000
11/17/2011	8:24:37 PM	BCl3 MFC set to  0.000000
11/17/2011	8:24:37 PM	PHl3 MFC set to  0.000000
11/17/2011	8:24:37 PM	SiCl4 MFC set to  0.000000
11/17/2011	8:24:37 PM	Bypass solenoid MFC set to  0.000000
11/17/2011	8:24:37 PM	Tube furnace set to 0
11/17/2011	8:24:40 PM	H2 valve closed
11/17/2011	8:24:40 PM	BCl3 valve closed
11/17/2011	8:24:40 PM	PH3 valve closed
11/17/2011	8:24:40 PM	SiCl4 pre valve closed
11/17/2011	8:24:40 PM	SiCl4 post valve closed
11/17/2011	8:24:40 PM	Main Vac valve closed
11/17/2011	8:24:40 PM	Bypass valve closed
11/17/2011	8:24:40 PM	Bubbler valve closed
11/17/2011	8:24:40 PM	Helium valve opened
11/17/2011	8:24:40 PM	Helium MFC set to  500.000000
11/17/2011	8:24:40 PM	H2 MFC set to  0.000000
11/17/2011	8:24:40 PM	BCl3 MFC set to  0.000000
11/17/2011	8:24:40 PM	PHl3 MFC set to  0.000000
11/17/2011	8:24:40 PM	SiCl4 MFC set to  0.000000
11/17/2011	8:24:40 PM	Bypass solenoid MFC set to  0.000000
11/17/2011	8:24:40 PM	Tube furnace set to 0
11/17/2011	8:25:39 PM	Helium valve closed
11/17/2011	8:25:39 PM	H2 valve closed
11/17/2011	8:25:39 PM	BCl3 valve closed
11/17/2011	8:25:39 PM	PH3 valve closed
11/17/2011	8:25:39 PM	SiCl4 pre valve closed
11/17/2011	8:25:39 PM	SiCl4 post valve closed
11/17/2011	8:25:39 PM	Main Vac valve closed
11/17/2011	8:25:39 PM	Bypass valve closed
11/17/2011	8:25:39 PM	Bubbler valve closed
11/17/2011	8:25:39 PM	Helium MFC set to  0.000000
11/17/2011	8:25:39 PM	H2 MFC set to  0.000000
11/17/2011	8:25:39 PM	BCl3 MFC set to  0.000000
11/17/2011	8:25:39 PM	PHl3 MFC set to  0.000000
11/17/2011	8:25:39 PM	SiCl4 MFC set to  0.000000
11/17/2011	8:25:39 PM	Bypass solenoid MFC set to  0.000000
11/17/2011	8:25:40 PM	Tube furnace set to 0
11/17/2011	8:25:41 PM	Run finished at 8:25 PM
11/17/2011	8:25:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/17/2011	8:29:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/17/2011	8:29:12 PM	Recipe started at 8:29 PM
11/17/2011	8:29:12 PM	Helium valve closed
11/17/2011	8:29:12 PM	H2 valve closed
11/17/2011	8:29:12 PM	BCl3 valve closed
11/17/2011	8:29:12 PM	PH3 valve closed
11/17/2011	8:29:12 PM	SiCl4 pre valve closed
11/17/2011	8:29:12 PM	SiCl4 post valve closed
11/17/2011	8:29:12 PM	Main Vac valve closed
11/17/2011	8:29:12 PM	Bubbler valve closed
11/17/2011	8:29:12 PM	Bypass valve opened
11/17/2011	8:29:12 PM	Helium MFC set to  0.000000
11/17/2011	8:29:12 PM	H2 MFC set to  0.000000
11/17/2011	8:29:12 PM	BCl3 MFC set to  0.000000
11/17/2011	8:29:12 PM	PHl3 MFC set to  0.000000
11/17/2011	8:29:12 PM	SiCl4 MFC set to  0.000000
11/17/2011	8:29:12 PM	Bypass solenoid MFC set to  0.000000
11/17/2011	8:29:12 PM	Tube furnace set to 0
11/17/2011	8:31:02 PM	Helium valve closed
11/17/2011	8:31:02 PM	H2 valve closed
11/17/2011	8:31:02 PM	BCl3 valve closed
11/17/2011	8:31:02 PM	PH3 valve closed
11/17/2011	8:31:02 PM	SiCl4 pre valve closed
11/17/2011	8:31:02 PM	SiCl4 post valve closed
11/17/2011	8:31:02 PM	Main Vac valve closed
11/17/2011	8:31:02 PM	Bubbler valve closed
11/17/2011	8:31:02 PM	Bypass valve opened
11/17/2011	8:31:02 PM	Helium MFC set to  0.000000
11/17/2011	8:31:02 PM	H2 MFC set to  0.000000
11/17/2011	8:31:02 PM	BCl3 MFC set to  0.000000
11/17/2011	8:31:02 PM	PHl3 MFC set to  0.000000
11/17/2011	8:31:02 PM	SiCl4 MFC set to  0.000000
11/17/2011	8:31:02 PM	Bypass solenoid MFC set to  0.000000
11/17/2011	8:31:02 PM	Tube furnace set to 0
11/17/2011	8:32:02 PM	Helium valve closed
11/17/2011	8:32:02 PM	H2 valve closed
11/17/2011	8:32:02 PM	BCl3 valve closed
11/17/2011	8:32:02 PM	PH3 valve closed
11/17/2011	8:32:02 PM	SiCl4 pre valve closed
11/17/2011	8:32:02 PM	SiCl4 post valve closed
11/17/2011	8:32:02 PM	Bypass valve closed
11/17/2011	8:32:02 PM	Bubbler valve closed
11/17/2011	8:32:02 PM	Main Vac valve opened
11/17/2011	8:32:02 PM	Helium MFC set to  0.000000
11/17/2011	8:32:02 PM	H2 MFC set to  0.000000
11/17/2011	8:32:02 PM	BCl3 MFC set to  0.000000
11/17/2011	8:32:02 PM	PHl3 MFC set to  0.000000
11/17/2011	8:32:02 PM	SiCl4 MFC set to  0.000000
11/17/2011	8:32:02 PM	Bypass solenoid MFC set to  0.000000
11/17/2011	8:32:02 PM	Tube furnace set to 0
11/17/2011	8:32:03 PM	Run finished at 8:32 PM
11/17/2011	8:32:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/17/2011	9:12:54 PM	Helium MFC set to  20.000000
11/17/2011	9:12:55 PM	Helium valve opened
11/17/2011	9:14:12 PM	Helium valve closed
11/17/2011	9:14:15 PM	Helium MFC set to  0.000000
11/17/2011	9:16:04 PM	Main Vac valve closed
11/17/2011	9:16:23 PM	Main Vac valve opened
11/17/2011	9:16:27 PM	Helium MFC set to  20.000000
11/17/2011	9:16:28 PM	Helium valve opened
11/17/2011	9:19:11 PM	Helium valve closed
11/17/2011	9:20:57 PM	Main Vac valve closed
11/17/2011	9:21:30 PM	Main Vac valve opened
11/17/2011	9:21:34 PM	Helium valve opened
11/17/2011	9:21:38 PM	Helium valve closed
11/17/2011	9:33:03 PM	Main Vac valve closed
11/17/2011	9:33:35 PM	Main Vac valve opened
11/17/2011	9:34:03 PM	Recipe started at 9:34 PM
11/17/2011	9:34:03 PM	Helium valve closed
11/17/2011	9:34:03 PM	H2 valve closed
11/17/2011	9:34:03 PM	BCl3 valve closed
11/17/2011	9:34:03 PM	PH3 valve closed
11/17/2011	9:34:03 PM	SiCl4 pre valve closed
11/17/2011	9:34:03 PM	SiCl4 post valve closed
11/17/2011	9:34:03 PM	Main Vac valve closed
11/17/2011	9:34:03 PM	Bypass valve closed
11/17/2011	9:34:03 PM	Bubbler valve closed
11/17/2011	9:34:03 PM	Helium MFC set to  0.000000
11/17/2011	9:34:03 PM	H2 MFC set to  0.000000
11/17/2011	9:34:03 PM	BCl3 MFC set to  0.000000
11/17/2011	9:34:03 PM	PHl3 MFC set to  0.000000
11/17/2011	9:34:03 PM	SiCl4 MFC set to  0.000000
11/17/2011	9:34:03 PM	Bypass solenoid MFC set to  0.000000
11/17/2011	9:34:04 PM	Tube furnace set to 0
11/17/2011	9:34:07 PM	Helium valve closed
11/17/2011	9:34:07 PM	BCl3 valve closed
11/17/2011	9:34:07 PM	PH3 valve closed
11/17/2011	9:34:07 PM	SiCl4 pre valve closed
11/17/2011	9:34:07 PM	SiCl4 post valve closed
11/17/2011	9:34:07 PM	Main Vac valve closed
11/17/2011	9:34:07 PM	Bypass valve closed
11/17/2011	9:34:07 PM	Bubbler valve closed
11/17/2011	9:34:07 PM	H2 valve opened
11/17/2011	9:34:07 PM	Helium MFC set to  0.000000
11/17/2011	9:34:07 PM	H2 MFC set to  500.000000
11/17/2011	9:34:07 PM	BCl3 MFC set to  0.000000
11/17/2011	9:34:07 PM	PHl3 MFC set to  0.000000
11/17/2011	9:34:07 PM	SiCl4 MFC set to  0.000000
11/17/2011	9:34:07 PM	Bypass solenoid MFC set to  0.000000
11/17/2011	9:34:07 PM	Tube furnace set to 50
11/17/2011	9:35:13 PM	Helium valve closed
11/17/2011	9:35:13 PM	BCl3 valve closed
11/17/2011	9:35:13 PM	PH3 valve closed
11/17/2011	9:35:13 PM	SiCl4 pre valve closed
11/17/2011	9:35:13 PM	SiCl4 post valve closed
11/17/2011	9:35:13 PM	Main Vac valve closed
11/17/2011	9:35:13 PM	Bypass valve closed
11/17/2011	9:35:13 PM	H2 valve opened
11/17/2011	9:35:13 PM	Bubbler valve opened
11/17/2011	9:35:13 PM	Helium MFC set to  0.000000
11/17/2011	9:35:13 PM	H2 MFC set to  500.000000
11/17/2011	9:35:13 PM	BCl3 MFC set to  0.000000
11/17/2011	9:35:13 PM	PHl3 MFC set to  0.000000
11/17/2011	9:35:13 PM	SiCl4 MFC set to  0.000000
11/17/2011	9:35:13 PM	Bypass solenoid MFC set to  0.000000
11/17/2011	9:35:13 PM	Tube furnace set to 50
11/17/2011	9:35:14 PM	Helium valve closed
11/17/2011	9:35:14 PM	BCl3 valve closed
11/17/2011	9:35:14 PM	PH3 valve closed
11/17/2011	9:35:14 PM	SiCl4 pre valve closed
11/17/2011	9:35:14 PM	SiCl4 post valve closed
11/17/2011	9:35:14 PM	Main Vac valve closed
11/17/2011	9:35:14 PM	Bypass valve closed
11/17/2011	9:35:14 PM	H2 valve opened
11/17/2011	9:35:14 PM	Bubbler valve opened
11/17/2011	9:35:14 PM	Helium MFC set to  0.000000
11/17/2011	9:35:14 PM	H2 MFC set to  450.000000
11/17/2011	9:35:14 PM	BCl3 MFC set to  0.000000
11/17/2011	9:35:14 PM	PHl3 MFC set to  0.000000
11/17/2011	9:35:14 PM	SiCl4 MFC set to  0.000000
11/17/2011	9:35:14 PM	Bypass solenoid MFC set to  0.000000
11/17/2011	9:35:14 PM	Tube furnace set to 1000
11/17/2011	9:58:14 PM	Helium valve closed
11/17/2011	9:58:14 PM	PH3 valve closed
11/17/2011	9:58:14 PM	Main Vac valve closed
11/17/2011	9:58:14 PM	Bypass valve closed
11/17/2011	9:58:14 PM	H2 valve opened
11/17/2011	9:58:14 PM	BCl3 valve opened
11/17/2011	9:58:14 PM	SiCl4 pre valve opened
11/17/2011	9:58:14 PM	SiCl4 post valve opened
11/17/2011	9:58:14 PM	Bubbler valve opened
11/17/2011	9:58:14 PM	Helium MFC set to  0.000000
11/17/2011	9:58:14 PM	H2 MFC set to  490.000000
11/17/2011	9:58:14 PM	BCl3 MFC set to  1.200000
11/17/2011	9:58:14 PM	PHl3 MFC set to  0.000000
11/17/2011	9:58:14 PM	SiCl4 MFC set to  30.000000
11/17/2011	9:58:14 PM	Bypass solenoid MFC set to  0.000000
11/17/2011	9:58:15 PM	Tube furnace set to 1000
11/17/2011	10:20:15 PM	Helium valve closed
11/17/2011	10:20:15 PM	BCl3 valve closed
11/17/2011	10:20:15 PM	PH3 valve closed
11/17/2011	10:20:15 PM	SiCl4 pre valve closed
11/17/2011	10:20:15 PM	SiCl4 post valve closed
11/17/2011	10:20:15 PM	Main Vac valve closed
11/17/2011	10:20:15 PM	Bypass valve closed
11/17/2011	10:20:15 PM	H2 valve opened
11/17/2011	10:20:15 PM	Bubbler valve opened
11/17/2011	10:20:15 PM	Helium MFC set to  0.000000
11/17/2011	10:20:15 PM	H2 MFC set to  480.000000
11/17/2011	10:20:15 PM	BCl3 MFC set to  0.000000
11/17/2011	10:20:15 PM	PHl3 MFC set to  0.000000
11/17/2011	10:20:15 PM	SiCl4 MFC set to  0.000000
11/17/2011	10:20:15 PM	Bypass solenoid MFC set to  0.000000
11/17/2011	10:20:15 PM	Tube furnace set to 750
11/17/2011	10:30:15 PM	H2 valve closed
11/17/2011	10:30:15 PM	BCl3 valve closed
11/17/2011	10:30:15 PM	PH3 valve closed
11/17/2011	10:30:15 PM	SiCl4 pre valve closed
11/17/2011	10:30:15 PM	SiCl4 post valve closed
11/17/2011	10:30:15 PM	Main Vac valve closed
11/17/2011	10:30:15 PM	Bypass valve closed
11/17/2011	10:30:15 PM	Helium valve opened
11/17/2011	10:30:15 PM	Bubbler valve opened
11/17/2011	10:30:15 PM	Helium MFC set to  400.000000
11/17/2011	10:30:15 PM	H2 MFC set to  0.000000
11/17/2011	10:30:15 PM	BCl3 MFC set to  0.000000
11/17/2011	10:30:15 PM	PHl3 MFC set to  0.000000
11/17/2011	10:30:15 PM	SiCl4 MFC set to  0.000000
11/17/2011	10:30:15 PM	Bypass solenoid MFC set to  0.000000
11/17/2011	10:30:15 PM	Tube furnace set to 0
11/17/2011	10:37:06 PM	Helium valve closed
11/17/2011	10:37:06 PM	H2 valve closed
11/17/2011	10:37:06 PM	BCl3 valve closed
11/17/2011	10:37:06 PM	PH3 valve closed
11/17/2011	10:37:06 PM	SiCl4 pre valve closed
11/17/2011	10:37:06 PM	SiCl4 post valve closed
11/17/2011	10:37:06 PM	Main Vac valve closed
11/17/2011	10:37:06 PM	Bypass valve closed
11/17/2011	10:37:06 PM	Bubbler valve closed
11/17/2011	10:37:06 PM	Helium MFC set to  0.000000
11/17/2011	10:37:06 PM	H2 MFC set to  0.000000
11/17/2011	10:37:06 PM	BCl3 MFC set to  0.000000
11/17/2011	10:37:06 PM	PHl3 MFC set to  0.000000
11/17/2011	10:37:06 PM	SiCl4 MFC set to  0.000000
11/17/2011	10:37:06 PM	Bypass solenoid MFC set to  0.000000
11/17/2011	10:37:06 PM	Tube furnace set to 50
11/17/2011	10:37:09 PM	Helium valve closed
11/17/2011	10:37:09 PM	H2 valve closed
11/17/2011	10:37:09 PM	BCl3 valve closed
11/17/2011	10:37:09 PM	PH3 valve closed
11/17/2011	10:37:09 PM	SiCl4 pre valve closed
11/17/2011	10:37:09 PM	SiCl4 post valve closed
11/17/2011	10:37:09 PM	Main Vac valve closed
11/17/2011	10:37:09 PM	Bubbler valve closed
11/17/2011	10:37:09 PM	Bypass valve opened
11/17/2011	10:37:09 PM	Helium MFC set to  0.000000
11/17/2011	10:37:09 PM	H2 MFC set to  0.000000
11/17/2011	10:37:09 PM	BCl3 MFC set to  0.000000
11/17/2011	10:37:09 PM	PHl3 MFC set to  0.000000
11/17/2011	10:37:09 PM	SiCl4 MFC set to  0.000000
11/17/2011	10:37:09 PM	Bypass solenoid MFC set to  0.000000
11/17/2011	10:37:09 PM	Tube furnace set to 0
11/17/2011	10:37:10 PM	Run aborted at 10:37 PM
11/17/2011	10:37:10 PM	Helium valve closed
11/17/2011	10:37:10 PM	H2 valve closed
11/17/2011	10:37:10 PM	BCl3 valve closed
11/17/2011	10:37:10 PM	PH3 valve closed
11/17/2011	10:37:10 PM	SiCl4 pre valve closed
11/17/2011	10:37:10 PM	SiCl4 post valve closed
11/17/2011	10:37:10 PM	Bypass valve closed
11/17/2011	10:37:10 PM	Main Vac valve closed
11/17/2011	10:37:10 PM	Bubbler valve closed
11/17/2011	10:37:10 PM	Helium MFC set to  0.000000
11/17/2011	10:37:10 PM	H2 MFC set to  0.000000
11/17/2011	10:37:10 PM	BCl3 MFC set to  0.000000
11/17/2011	10:37:10 PM	PHl3 MFC set to  0.000000
11/17/2011	10:37:10 PM	SiCl4 MFC set to  0.000000
11/17/2011	10:37:10 PM	Tube furnace set to 0
11/17/2011	10:37:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/17/2011	10:37:15 PM	Recipe started at 10:37 PM
11/17/2011	10:37:15 PM	Helium valve closed
11/17/2011	10:37:15 PM	H2 valve closed
11/17/2011	10:37:15 PM	BCl3 valve closed
11/17/2011	10:37:15 PM	PH3 valve closed
11/17/2011	10:37:15 PM	SiCl4 pre valve closed
11/17/2011	10:37:15 PM	SiCl4 post valve closed
11/17/2011	10:37:15 PM	Main Vac valve closed
11/17/2011	10:37:15 PM	Bypass valve closed
11/17/2011	10:37:15 PM	Bubbler valve closed
11/17/2011	10:37:15 PM	Helium MFC set to  0.000000
11/17/2011	10:37:15 PM	H2 MFC set to  0.000000
11/17/2011	10:37:15 PM	BCl3 MFC set to  0.000000
11/17/2011	10:37:15 PM	PHl3 MFC set to  0.000000
11/17/2011	10:37:15 PM	SiCl4 MFC set to  0.000000
11/17/2011	10:37:15 PM	Bypass solenoid MFC set to  0.000000
11/17/2011	10:37:15 PM	Tube furnace set to 0
11/17/2011	10:37:18 PM	H2 valve closed
11/17/2011	10:37:18 PM	BCl3 valve closed
11/17/2011	10:37:18 PM	PH3 valve closed
11/17/2011	10:37:18 PM	SiCl4 pre valve closed
11/17/2011	10:37:18 PM	SiCl4 post valve closed
11/17/2011	10:37:18 PM	Main Vac valve closed
11/17/2011	10:37:18 PM	Bypass valve closed
11/17/2011	10:37:18 PM	Bubbler valve closed
11/17/2011	10:37:18 PM	Helium valve opened
11/17/2011	10:37:18 PM	Helium MFC set to  500.000000
11/17/2011	10:37:18 PM	H2 MFC set to  0.000000
11/17/2011	10:37:18 PM	BCl3 MFC set to  0.000000
11/17/2011	10:37:18 PM	PHl3 MFC set to  0.000000
11/17/2011	10:37:18 PM	SiCl4 MFC set to  0.000000
11/17/2011	10:37:18 PM	Bypass solenoid MFC set to  0.000000
11/17/2011	10:37:19 PM	Tube furnace set to 0
11/17/2011	10:37:43 PM	Helium valve closed
11/17/2011	10:37:43 PM	H2 valve closed
11/17/2011	10:37:43 PM	BCl3 valve closed
11/17/2011	10:37:43 PM	PH3 valve closed
11/17/2011	10:37:43 PM	SiCl4 pre valve closed
11/17/2011	10:37:43 PM	SiCl4 post valve closed
11/17/2011	10:37:43 PM	Main Vac valve closed
11/17/2011	10:37:43 PM	Bypass valve closed
11/17/2011	10:37:43 PM	Bubbler valve closed
11/17/2011	10:37:43 PM	Helium MFC set to  0.000000
11/17/2011	10:37:43 PM	H2 MFC set to  0.000000
11/17/2011	10:37:43 PM	BCl3 MFC set to  0.000000
11/17/2011	10:37:43 PM	PHl3 MFC set to  0.000000
11/17/2011	10:37:43 PM	SiCl4 MFC set to  0.000000
11/17/2011	10:37:43 PM	Bypass solenoid MFC set to  0.000000
11/17/2011	10:37:44 PM	Tube furnace set to 0
11/17/2011	10:37:45 PM	Run finished at 10:37 PM
11/17/2011	10:37:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/17/2011	10:40:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/17/2011	10:40:03 PM	Recipe started at 10:40 PM
11/17/2011	10:40:03 PM	Helium valve closed
11/17/2011	10:40:03 PM	H2 valve closed
11/17/2011	10:40:03 PM	BCl3 valve closed
11/17/2011	10:40:03 PM	PH3 valve closed
11/17/2011	10:40:03 PM	SiCl4 pre valve closed
11/17/2011	10:40:03 PM	SiCl4 post valve closed
11/17/2011	10:40:03 PM	Main Vac valve closed
11/17/2011	10:40:03 PM	Bubbler valve closed
11/17/2011	10:40:03 PM	Bypass valve opened
11/17/2011	10:40:03 PM	Helium MFC set to  0.000000
11/17/2011	10:40:03 PM	H2 MFC set to  0.000000
11/17/2011	10:40:03 PM	BCl3 MFC set to  0.000000
11/17/2011	10:40:03 PM	PHl3 MFC set to  0.000000
11/17/2011	10:40:03 PM	SiCl4 MFC set to  0.000000
11/17/2011	10:40:03 PM	Bypass solenoid MFC set to  0.000000
11/17/2011	10:40:03 PM	Tube furnace set to 0
11/17/2011	10:41:43 PM	Helium valve closed
11/17/2011	10:41:43 PM	H2 valve closed
11/17/2011	10:41:43 PM	BCl3 valve closed
11/17/2011	10:41:43 PM	PH3 valve closed
11/17/2011	10:41:43 PM	SiCl4 pre valve closed
11/17/2011	10:41:43 PM	SiCl4 post valve closed
11/17/2011	10:41:43 PM	Main Vac valve closed
11/17/2011	10:41:43 PM	Bubbler valve closed
11/17/2011	10:41:43 PM	Bypass valve opened
11/17/2011	10:41:43 PM	Helium MFC set to  0.000000
11/17/2011	10:41:43 PM	H2 MFC set to  0.000000
11/17/2011	10:41:43 PM	BCl3 MFC set to  0.000000
11/17/2011	10:41:43 PM	PHl3 MFC set to  0.000000
11/17/2011	10:41:43 PM	SiCl4 MFC set to  0.000000
11/17/2011	10:41:43 PM	Bypass solenoid MFC set to  0.000000
11/17/2011	10:41:43 PM	Tube furnace set to 0
11/17/2011	10:42:43 PM	Helium valve closed
11/17/2011	10:42:43 PM	H2 valve closed
11/17/2011	10:42:43 PM	BCl3 valve closed
11/17/2011	10:42:43 PM	PH3 valve closed
11/17/2011	10:42:43 PM	SiCl4 pre valve closed
11/17/2011	10:42:43 PM	SiCl4 post valve closed
11/17/2011	10:42:43 PM	Bypass valve closed
11/17/2011	10:42:43 PM	Bubbler valve closed
11/17/2011	10:42:43 PM	Main Vac valve opened
11/17/2011	10:42:43 PM	Helium MFC set to  0.000000
11/17/2011	10:42:43 PM	H2 MFC set to  0.000000
11/17/2011	10:42:43 PM	BCl3 MFC set to  0.000000
11/17/2011	10:42:43 PM	PHl3 MFC set to  0.000000
11/17/2011	10:42:43 PM	SiCl4 MFC set to  0.000000
11/17/2011	10:42:43 PM	Bypass solenoid MFC set to  0.000000
11/17/2011	10:42:44 PM	Tube furnace set to 0
11/17/2011	10:42:45 PM	Run finished at 10:42 PM
11/17/2011	10:42:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
